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    Title :

    New phase-shifting technique for deep UV excimer laser based lithography [2380-31]


    Contributors:

    Conference:

    Conference, UV and visible lasers and laser crystal growth ; 1995 ; San Jose; CA



    Publication date :

    1995-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Nr. 2380

    DataCite | 1891


    ArF and KrF excimer lasers with long lifetime: a status report [2380-33]

    Chumak, G. M. / SPIE | British Library Conference Proceedings | 1995


    Solid state dye laser [2380-43]

    Meshkovskii, I. K. / Zemskii, V. I. / Kolesnikov, Y. L. et al. | British Library Conference Proceedings | 1995


    Dye laser phase distortion correction using stimulated Brillouin scattering [2380-40]

    Kessler, W. J. / Davis, S. J. / Pugh, E. et al. | British Library Conference Proceedings | 1995