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    Title :

    Reactive ion etching (RIE) control by optical emission endpoint detection in IR focal plane array production [2228-31]



    Conference:

    Conference, Producibility of II-VI materials and devices ; 1994 ; Orlando; FL



    Publication date :

    1994-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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