Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Proximity-compensated kinoforms directly written by e-beam lithography


    Contributors:

    Conference:

    Conference, Diffractive and miniaturized optics ; 1993 ; San Diego; CA



    Publication date :

    1994-01-01


    Size :

    27 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Polarization modifying kinoforms

    Kotlyar, V. V. / Zalyalov, O. K. / Russian Academy of Sciences et al. | British Library Conference Proceedings | 1994


    Kinoforms for wideband use

    Arieli, Y. / Lauber, Y. Z. / Eisenberg, N. P. et al. | British Library Conference Proceedings | 1995


    DTuD27 Multifacet kinoforms for KrF excimer laser

    Schaefer, D. / Ihlemann, J. / Marowsky, G. et al. | British Library Conference Proceedings | 2000


    Shape distortion of diffractive optical elements, directly written with electron beam lithography

    Nikolajeft, F. / Ekberg, M. / Larsson, M. et al. | British Library Conference Proceedings | 1993


    Iterative weight-based method for calculating kinoforms

    Kotlyar, V. V. / Seraphimovich, P. G. / Soifer, V. A. et al. | British Library Conference Proceedings | 1994