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Feinwerktechnik
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keywords:("Feinwerktechnik")
Novel method for making parabolic grating [2687-17]
Actuation of polysilicon surface-micromachined mirrors [2687-07]
Fabrication of microlens arrays by reactive ion milling [2687-19]
Design and fabrication issues in the development of monolithic micro-optical systems [2687-12]
Analysis of optical beam steering using phased micromirror arrays [2687-08]
Micromirror arrays for active optical aberration control [2687-02]
Micro-size ball lenses for micro-optics: theory and experiment (Invited Paper) [2687-13]
Optical network of silicon micromachined sensors [2687-10]
Miniaturized systems with micro-optics and micromechanics : 30 - 31 January, San Jose, California
Strength of indium-phosphide-based microstructures [3008-28]
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
Optical communication link using a micromachined corner cube reflector [3008-20]
Microjoinery for optomechanical systems [3008-49]
Optical probe for micromachine performance analysis [3008-06]