Microjoinery for optomechanical systems [3008-49]
Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA
1997-01-01
9 pages
Aufsatz (Konferenz)
Englisch
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Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
British Library Conference Proceedings | 1997
|Online Contents | 2009
Kraftfahrwesen | 2009
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Kraftfahrwesen | 2012
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