Optical network of silicon micromachined sensors [2687-10]
Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA
1996-01-01
11 pages
Aufsatz (Konferenz)
Englisch
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Actuation of polysilicon surface-micromachined mirrors [2687-07]
British Library Conference Proceedings | 1996
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British Library Conference Proceedings | 1996
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