Magnetically actuated MEMS scanning mirror [2687-06]
Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA
1996-01-01
6 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1897
Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect
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