1–20 von 65 Ergebnissen
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    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    X-ray investigations of a near surface layer of metal samples [4099-33]

    Gilev, O. N. / Asadchikov, V. E. / Duparre, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Versatile optical system for static and dynamic thermomagnetic recording using a scanning laser microscope [4449-26]

    Clegg, W. W. / Jenkins, D. F. / Helian, N. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]

    Woollam, J. A. / Hilfiker, J. N. / Tiwald, T. E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Stitching interferometry of aspherical surfaces [4449-34]

    Hansel, T. / Nickel, A. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO~2 [4099-27]

    Leng, J. / Li, S. / Opsal, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]

    Johs, B. D. / Hale, J. / Ianno, N. J. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al~2O~3/Ta/SiO~2/Si [4449-30]

    Leng, J. / Opsal, J. L. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries