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Oberflächenbehandlung
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keywords:(Oberflächenbehandlung)
A precise and contactless angle detection sensor using surface micromachining technology
Electrical contact resistance in lithium-ion battery modules
Exciting colour effects and surface design by vacuum deposition
Investigation on the pressure-dependent performance of a surface micromachined gyroscope
Monolithic surface-micromachined sensor system for high pressure applications
Optics in solar cells and batteries for Soviet space application
Silicon microsystems for automotive applications