A new generation of pressure sensor ICs for automotive and industrial applications will be presented. Surface micromachined capacitive sensor cells are embedded into a standard BiCMOS-Process, yielding a monolithically integrated High-Pressure-Sensor-System. On-Chip signal conditioning includes functions such as detection of pressure dependent capacity, A/D conversion, digital calibration, temperature compensation, D/A reconversion and ratiometric analog output. The sensor systems are operating in pressure ranges up to 400 bar with an accuracy of 1.5 % in a premoulded DSOF-8 standard package. With several 40 bar and 200 bar sensor systems overpressure tests up to 600 bar were passed succesfully.


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    Titel :

    Monolithic surface-micromachined sensor system for high pressure applications


    Weitere Titelangaben:

    Die monolithische Oberflächenbearbeitung von Sensorsystemen für Messungen bei hohen Drücken


    Beteiligte:
    Kapels, H. (Autor:in) / Aigner, R. (Autor:in) / Kolle, C. (Autor:in)


    Erscheinungsdatum :

    2001


    Format / Umfang :

    4 Seiten, 9 Bilder, 1 Tabelle, 5 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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