1–20 von 65 Ergebnissen
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    Optical metrology roadmap for the semiconductor, optical, and data storage industries

    Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference | TIBKAT | 2001
    Schlagwörter: Optical measurements

    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    2D-area/3D-volume holographic optical storage nanotechnology [4099-22]

    Thomas, M. E. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]

    Li, J. / Xiao, S. / Li, X. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Development of an automated optical system for the analysis of etch pits density and distribution on semiconductor materials [4099-02]

    Dedavid, B. A. / da Costa, E. M. / Soares, A. B. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Versatile optical system for static and dynamic thermomagnetic recording using a scanning laser microscope [4449-26]

    Clegg, W. W. / Jenkins, D. F. / Helian, N. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries