Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Optical metrology roadmap for the semiconductor, optical, and data storage industries



    Kongress:

    Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference ; 2001 ; San Diego, Calif. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference (San Diego, Calif.) : 2001.08.02-03
    Annual SPIE International Symposium on Optical Science and Technology ; 46 ; 2001 ; San Diego, Calif.
    Annual SPIE International Symposium on Optical Science and Technology ; 46 (San Diego, Calif.) : 2001.08.02-03


    Erschienen in:

    Erscheinungsdatum :

    2001


    Format / Umfang :

    IX, 294 S



    Medientyp :

    Konferenzband


    Format :

    Print


    Sprache :

    Englisch



    Klassifikation :

    DDC:    621.381/045




    Optical metrology of semiconductor wafers in lithography

    den Boef,A.J. / ASML,Veldhoven,NL | Kraftfahrwesen | 2012


    Roadmap of optical computing

    Zhou, Changhe / Yu, Junjie / Li, Guowei et al. | British Library Conference Proceedings | 2021


    Optical Fiber Metrology

    Day, G.W. / Franzen, D.L. | British Library Online Contents | 2008


    A Roadmap for Optical Lithography

    Rothschild, M. | British Library Online Contents | 2010