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Oberflächenbehandlung
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keywords:(Oberflächenbehandlung)
Silicon microsystems for automotive applications
Optics in solar cells and batteries for Soviet space application
Monolithic surface-micromachined sensor system for high pressure applications
Investigation on the pressure-dependent performance of a surface micromachined gyroscope
Exciting colour effects and surface design by vacuum deposition
Electrical contact resistance in lithium-ion battery modules
A precise and contactless angle detection sensor using surface micromachining technology