Synonyme wurden verwendet für: metrology
Suche ohne Synonyme: keywords:(optical metrology)

1–20 von 95 Ergebnissen
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    Practical applications of laser holography in metrology for 3D imaging and industrial inspection [3520-41]

    Ginzburg, V. M. / SPIE | British Library Conference Proceedings | 1998
    Schlagwörter: optical metrology

    Three-dimensional laser ranging image reconstruction using three-line laser sensors and fuzzy methods [3835-12]

    Bursanescu, L. / Hamdi, M. / SPIE | British Library Conference Proceedings | 1999
    Schlagwörter: optical metrology

    Statis omnidirectional stereoscopic display system [3835-10]

    Barton, G. G. / Feldman, S. / Beckstead, J. A. et al. | British Library Conference Proceedings | 1999
    Schlagwörter: optical metrology

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Development of an automated optical system for the analysis of etch pits density and distribution on semiconductor materials [4099-02]

    Dedavid, B. A. / da Costa, E. M. / Soares, A. B. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO~2 [4099-27]

    Leng, J. / Li, S. / Opsal, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]

    Lindmark, E. K. / Nowak, J. J. / Kief, M. T. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencies [4099-06]

    Crozier, K. B. / Yaralioglu, G. G. / Degertekin, F. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    X-ray investigations of a near surface layer of metal samples [4099-33]

    Gilev, O. N. / Asadchikov, V. E. / Duparre, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]

    Li, J. / Xiao, S. / Li, X. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology