Experimental results of a high resolution holographic imaging system using lensless geometry are demonstrated. A master mask is imaged on a photopolymer and is recorded as a volume hologram, which is then employed as the hologrphic mask. Formation of a 0.5un resolution image was consistently observed in a large field with illumination by an Argon laser operating at 457 nm, and the pattern was successfully recorded on photoresist.
Holographic lithography for microcircuits
Practical Holography IV ; 1990 ; Los Angeles,CA,United States
Proc. SPIE ; 1212
1990-05-01
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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