Experimental results of a high resolution holographic imaging system using lensless geometry are demonstrated. A master mask is imaged on a photopolymer and is recorded as a volume hologram, which is then employed as the hologrphic mask. Formation of a 0.5un resolution image was consistently observed in a large field with illumination by an Argon laser operating at 457 nm, and the pattern was successfully recorded on photoresist.


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    Titel :

    Holographic lithography for microcircuits


    Beteiligte:
    Chen, Ray T. (Autor:in) / Sadovnik, Lev S. (Autor:in) / Aye, Tin M. (Autor:in) / Jannson, Tomasz P. (Autor:in)

    Kongress:

    Practical Holography IV ; 1990 ; Los Angeles,CA,United States


    Erschienen in:

    Erscheinungsdatum :

    1990-05-01





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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