High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma
Solar energy materials & solar cells ; 66 , 1 ; 337-344
2001
Aufsatz (Zeitschrift)
Englisch
Hydrogenated amorphous silicon alloy deposition processes
TIBKAT | 1993
|Investigations on hydrogenated amorphous silicon films grown at high rate in a UHV plasma CVD system
Online Contents | 1995
|Hydrogenated amorphous silicon films with significantly improved stability
Online Contents | 2001
|