Summary form only given. We focus on a simpler discharge geometry that is more amenable to mass production. These devices consist of a Si cathode, a pyrex dielectric layer, and a Ni anode and differ from those previously reported in that the cathode is a plane rather than a cylinder. The devices are fabricated by drilling a hole in the pyrex using ultrasonic milling, anodically bonding the pyrex onto a silicon substrate, and then depositing the nickel anode.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Characteristics of microdischarge devices in silicon


    Beteiligte:
    Frame, J.W. (Autor:in) / John, P.C. (Autor:in) / Bozeman, B. (Autor:in) / Wheeler, D.J. (Autor:in) / Eden, J.G. (Autor:in) / DeTemple, T.A. (Autor:in)


    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    87493 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Characteristics of Microdischarge Devices in Silicon

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1998


    Microdischarge devices in silicon

    DeTemple, T.A. / Frame, J.W. / Wheeler, D.J. et al. | IEEE | 1997



    Photodetection with Silicon Pyramidal Microdischarge Devices

    Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers) | British Library Conference Proceedings | 2004


    Microdischarge devices reach large pixel counts

    British Library Online Contents | 2005