The performance of Si microdischarge photodetectors has been characterized in detail in the visible and near-infrared with near-atmospheric Ne plasmas. This new hybrid semiconductor/plasma detector offers the potential for integration with other Si-based optoelectronic devices.
Photodetection with silicon pyramidal microdischarge devices
2004-01-01
65493 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Photodetection with Silicon Pyramidal Microdischarge Devices
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