A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.


    Zugriff

    Download


    Exportieren, teilen und zitieren



    Titel :

    SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD


    Beteiligte:
    LEE JUN KYU (Autor:in) / KIM HONGJIN (Autor:in) / BANG JEONGJAE (Autor:in)

    Erscheinungsdatum :

    2024-02-01


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES / F16F SPRINGS , Federn



    SUBSTRATE TRANSFER SYSTEM

    OH YOUN GON / KIM JI HUN / BANG SEUNG GU et al. | Europäisches Patentamt | 2023

    Freier Zugriff

    Substrate transfer system

    OH YOUN GON / KIM JI HUN / BANG SEUNG GU et al. | Europäisches Patentamt | 2024

    Freier Zugriff

    Substrate transfer apparatus and system

    LI FENG / WANG KAI | Europäisches Patentamt | 2018

    Freier Zugriff

    Substrate transfer robot end effector

    AGARWAL PULKIT / GREENBERG DANIEL / SUH SONG-MOON et al. | Europäisches Patentamt | 2016

    Freier Zugriff

    Mirror surface aluminum substrate transfer device

    HOU LIEGUO / ZHOU LINZHAN | Europäisches Patentamt | 2023

    Freier Zugriff