A substrate transfer system capable of performing efficient distribution exchange between fabricating facilities is provided. The substrate transfer system includes a lower rail, an upper rail which is located above the lower rail from a ground plane, and extends to be parallel to the lower rail, a conveyor which extends to intersect the lower rail and the upper rail, below the lower rail, a first lower transport unit which transports a first carrier along the lower rail and unloads the first carrier onto the conveyor, and a first upper transport unit which transports a second carrier along the upper rail and unloads the second carrier onto the conveyor, wherein the conveyor includes a linear module which moves the first carrier and the second carrier in a linear direction, and a turning module which turns the first carrier and the second carrier.
Substrate transfer system
14.05.2024
Patent
Elektronische Ressource
Englisch
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD
Europäisches Patentamt | 2024
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