A substrate transfer system capable of performing efficient distribution exchange between fabricating facilities is provided. The substrate transfer system includes a lower rail, an upper rail which is located above the lower rail from a ground plane, and extends to be parallel to the lower rail, a conveyor which extends to intersect the lower rail and the upper rail, below the lower rail, a first lower transport unit which transports a first carrier along the lower rail and unloads the first carrier onto the conveyor, and a first upper transport unit which transports a second carrier along the upper rail and unloads the second carrier onto the conveyor, wherein the conveyor includes a linear module which moves the first carrier and the second carrier in a linear direction, and a turning module which turns the first carrier and the second carrier.


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    Titel :

    SUBSTRATE TRANSFER SYSTEM


    Beteiligte:
    OH YOUN GON (Autor:in) / KIM JI HUN (Autor:in) / BANG SEUNG GU (Autor:in) / LEE SUNG-HOON (Autor:in) / LEE HO CHAN (Autor:in) / CHOO HYEONG SEOK (Autor:in)

    Erscheinungsdatum :

    2023-05-04


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66C Krane , CRANES



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