A wafer transport system includes a pod that contains one or more wafers in an enclosed environment, a substrate transport surface that extends substantially along a plane, intersecting at least first and second loading/unloading locations, and a pod controller that is configured to control movement of the pod by selecting a pathway from a plurality of available pathways extending along the substrate transport surface from the first loading/unloading location to the second loading/unloading location.


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    Titel :

    Wafer Transfer System


    Beteiligte:

    Erscheinungsdatum :

    21.04.2016


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B25J Manipulatoren , MANIPULATORS / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES



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