The invention discloses a semiconductor power device, a preparation method, a power module, a conversion circuit and a vehicle. The semiconductor power device comprises a semiconductor body; a trench gate structure; a gate located in a gate trench on the surface of the first region of the semiconductor body; the semiconductor body comprises a first contact region and a body region; the first contact region comprises a first sub-contact region and a second sub-contact region which respectively extend into the semiconductor body from the first surface, and the first sub-contact region is arranged along the side wall of the gate trench and is in contact with the trench gate structure; the second sub-contact region is located at one side, far away from the trench gate structure, of the first sub-contact region; the length of the first sub-contact region is greater than or equal to the thickness of the body region along the direction from the first surface to the second surface; and the contact metal layer is located on the surface of the second region of the semiconductor body and forms Schottky contact with the surface of the second region of the semiconductor body. According to the technical scheme provided by the invention, the preparation difficulty of the semiconductor power device is simplified, and the energy loss of the device in a reverse follow current state is reduced.
本发明公开了一种半导体功率器件、制备方法、功率模块、转换电路和车辆,半导体功率器件包括半导体本体;沟槽栅结构;位于半导体本体的第一区表面的栅极沟槽中;半导体本体包括第一接触区和体区;第一接触区包括第一子接触区和第二子接触区,分别从第一表面延伸至半导体本体中,第一子接触区沿栅极沟槽侧壁设置,并与沟槽栅结构接触;第二子接触区位于第一子接触区远离沟槽栅结构的一侧;沿第一表面到第二表面的方向,第一子接触区的长度大于等于体区的厚度;接触金属层,位于半导体本体的第二区表面,与半导体本体的第二区表面形成肖特基接触。本发明提供的技术方案,简化了半导体功率器件的制备难度,降低了器件在反向续流状态下的能量损耗。
Semiconductor power device, preparation method, power module, conversion circuit and vehicle
半导体功率器件、制备方法、功率模块、转换电路和车辆
16.05.2025
Patent
Elektronische Ressource
Chinesisch
IPC: | H02M APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS , Anlagen zur Umformung von Wechselstrom in Wechselstrom, von Wechselstrom in Gleichstrom oder umgekehrt, oder von Gleichstrom in Gleichstrom und zur Verwendung in Netzen oder ähnlichen Stromversorgungssystemen / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR / H10D |
Europäisches Patentamt | 2025
|SEMICONDUCTOR DEVICE, MANUFACTURING METHOD, POWER CONVERSION CIRCUIT, AND VEHICLE
Europäisches Patentamt | 2024
|Vehicle, photovoltaic system, power conversion circuit and power semiconductor device
Europäisches Patentamt | 2023
|SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, POWER CONVERSION CIRCUIT, AND VEHICLE
Europäisches Patentamt | 2024
|Power semiconductor device and preparation method thereof, power module and vehicle
Europäisches Patentamt | 2024
|