The invention discloses a lifting device and semiconductor process equipment, the lifting device comprises a telescopic supporting part and a lifting arm, the telescopic supporting part comprises a lifting driving part, a central column and a jacking sleeve, the central column is of a hollow structure and sleeves the lifting driving part, and the top end of the lifting driving part is connected with the jacking sleeve; the jacking sleeve is arranged outside the central column in a sleeving manner, slides relative to the central column under the driving of the lifting driving part so as to realize the stretching and retracting of the telescopic supporting part, is connected with the lifting arm and drives the lifting arm to lift in the stretching and retracting direction of the telescopic supporting part. According to the scheme, the problem that a lifting device in semiconductor process equipment related to the related technology is low in strength and prone to deformation in the lifting process can be solved.
本申请公开一种起吊装置及半导体工艺设备,所公开的起吊装置包括伸缩支撑部和吊臂,伸缩支撑部包括升降驱动部、中心柱和顶升套,中心柱为中空结构,且套于升降驱动部之外,升降驱动部的顶端与顶升套相连;顶升套套设于中心柱之外,且在升降驱动部的驱动下相对于中心柱滑动以实现伸缩支撑部伸缩,顶升套与吊臂相连,且带动吊臂在伸缩支撑部的伸缩方向升降。上述方案能解决相关技术涉及的半导体工艺设备中的起吊装置的强度较低,而容易在起吊过程中发生形变的问题。
Lifting device and semiconductor process equipment
起吊装置及半导体工艺设备
2024-05-03
Patent
Elektronische Ressource
Chinesisch
IPC: | B66C Krane , CRANES |
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