The invention belongs to the field of hoisting and transportation of objective lenses in lithographic projection lenses and provides a self-balancing hoisting device used in a lithographic projection lens. The problem of vibration impact and inclination of objective lenses in the hoisting and transportation processes of the objective lenses in the prior art is solved. The self-balancing hoisting device used in the lithographic projection lens comprises a hoisting board and hoisting rods; one end of each of the three hoisting rods is connected with the hoisting board. Each hoisting rod comprises an upper hoisting rod body, a lower hoisting rod body and a self-balancing adjustor, wherein one end of the upper hoisting rod body is fixedly connected with the hoisting board, and the other end of the upper hoisting rod body is connected with one end of the self-balancing adjustor adjustable in length; the other end of the self-balancing adjustor is connected with one end of the lower hoisting rod body; the self-balancing adjustor internally comprises a compression spring arranged at the junction of the self-balancing adjustor and the upper hoisting rod body.


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    Titel :

    Self-balancing hoisting device used in lithographic projection lens


    Beteiligte:
    SUN ZHEN (Autor:in) / ZHAO LEI (Autor:in) / NI MINGYANG (Autor:in) / SUI YONGXIN (Autor:in) / YANG HUAIJIANG (Autor:in) / ZHANG WEI (Autor:in)

    Erscheinungsdatum :

    20.01.2016


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B66C Krane , CRANES



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