Numerical modeling of chemical vapor deposition (CVD) in a horizontal reactor
1st National Fluid Dynamics Conference ; 1988 ; Cincinnati , OH , U.S.A.
01.01.1988
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Chemical-vapor-deposition reactor
| NTRS | 1979
HIGH EFFICIENCY EPITAXIAL CHEMICAL VAPOR DEPOSITION (CVD) REACTOR
| Europäisches Patentamt | 2016
Modeling chemical vapor deposition and etching processes
| AIAA | 1995