Submicron polymer structures with X-ray lithography and hot embossing
MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1721-1725
01.01.2008
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
UV nano embossing for polymer nano structures with non-transparent mold insert
British Library Online Contents | 2007
|Soft X-ray lithography of high aspect ratio SU8 submicron structures
British Library Online Contents | 2008
|Rapid hot embossing of polymer microfeatures
British Library Online Contents | 2006
|Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences
British Library Online Contents | 2014
|Method for polymer hot embossing process development
British Library Online Contents | 2007
|