Simulation on chemical mechanical polishing using atomic force microscope
JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Yokohama, 2003 ; 8/10 ; 1102-1106
MICROSYSTEM TECHNOLOGIES ; 11 , 8/10
01.01.2005
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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