A Young's Modulus Estimation of Silicon Dioxide Thin Films by Means of Vibration Measurement Micromachined Cantilevers
TRANSACTIONS- SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS ; 34 , 6 ; 479-482
1998-01-01
4 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC: | 629.8 |
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