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    Titel :

    Development of EUV light-source by CO~2-laser-produced plasma with nano-structured SnO~2 targets (LPM 2004 Student Paper Award: Poster) [5662-49]



    Kongress:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    Also known as LPM 2004.




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Laser direct write for release of SiO~2 MEMS and nano-scale devices (LPM 2004 Outstanding Poster Paper Award) [5662-88]

    Abraham, M. H. / Helvajian, H. / SPIE et al. | British Library Conference Proceedings | 2004


    Micromachining of transparent materials by laser-induced plasma-assisted ablation (LIPAA) (LPM 2004 Student Paper Award: Oral) [5662-85]

    Hanada, Y. / Sugioka, K. / Obata, K. et al. | British Library Conference Proceedings | 2004


    Development of EUV light source by CO~2-laser-produced Xe plasma [5662-57]

    Tanaka, H. / Akinaga, K. / Takahashi, A. et al. | British Library Conference Proceedings | 2004



    Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography [5662-58]

    Suganuma, T. / Abe, T. / Komori, H. et al. | British Library Conference Proceedings | 2004