Laser direct write for release of SiO~2 MEMS and nano-scale devices (LPM 2004 Outstanding Poster Paper Award) [5662-88]
International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan
2004-01-01
8 pages
Also known as LPM 2004.
Aufsatz (Konferenz)
Englisch
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