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    Titel :

    Optical Microelectromechanical Systems (OMEMS) Based on Silicon-on-Insulator (SOI) Technology


    Beteiligte:
    Noell, W. (Autor:in) / Clerc, P.-A. (Autor:in) / Guldimann, B. (Autor:in) / Schurmann, G. (Autor:in) / Staufer, U. (Autor:in) / de Rooij, N. (Autor:in) / Herzig, H. P. (Autor:in) / Manzardo, O. (Autor:in) / Dandliker, R. (Autor:in) / Marxer, C. (Autor:in)

    Kongress:

    Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ



    Erscheinungsdatum :

    2002-01-01


    Format / Umfang :

    3 pages


    Anmerkungen:

    Also known as DOMO; Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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