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    Titel :

    Shape distortion of diffractive optical elements, directly written with electron beam lithography



    Kongress:

    4th International conference, Holographic systems, components and applications ; 1993 ; Neuchatel; Switzerland



    Erscheinungsdatum :

    1993-01-01


    Format / Umfang :

    2 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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