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    Confining collateral damage to less than 10 nm during femtosecond laser machining

    Picard, Y.N. / Yalisove, S.M. / Hsiao-hua Liu, et al. | IEEE | 2004

    Effects of wavelength and doping concentration on silicon damage threshold

    Hsiao-hua Liu, / Mourou, G. / Picard, Y.N. et al. | IEEE | 2004

    SEM and SPM studies of single-shot damage on silicon

    Hsiao-hua Liu, / Mourou, G. / McDonald, J.P. et al. | IEEE | 2005

    The physics and limits of femtosecond laser micromachining

    Ke, K. / Joglekar, A.P. / Hsiao-hua Liu, et al. | IEEE | 2005