Scanning probe microscopy was used to study femtosecond laser ablation of silicon as a function of laser wavelength, doping concentration, and sample temperature to gain a greater understanding of the femtosecond laser damage mechanism.
SEM and SPM studies of single-shot damage on silicon
2005 Quantum Electronics and Laser Science Conference ; 2 ; 1221-1223 Vol. 2
2005-01-01
1936025 byte
Conference paper
Electronic Resource
English
British Library Conference Proceedings | 1993
|NTRS | 1983
|Probabilistic Damage Tolerance Analysis Considering Shot Peening Effect
British Library Conference Proceedings | 2009
|