Scanning probe microscopy was used to study femtosecond laser ablation of silicon as a function of laser wavelength, doping concentration, and sample temperature to gain a greater understanding of the femtosecond laser damage mechanism.


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    Title :

    SEM and SPM studies of single-shot damage on silicon


    Contributors:
    Hsiao-hua Liu, (author) / Mourou, G. (author) / McDonald, J.P. (author) / Picard, Y.N. (author) / Yalisove, S.M. (author) / Juhasz, T. (author)

    Published in:

    Publication date :

    2005-01-01


    Size :

    1936025 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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