1–20 of 45 hits
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    Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen

    Finck, Alexander von / Duparré, Angela / Pfeffer, Michael | IuD Bahn | 2009

    Bewertung von Nanorauheiten durch Streulichtmessung

    Schröder, Sven / Duparré, Angela / Tünnermann, Andrea | IuD Bahn | 2006

    Hochauflösende Topometrie im Kontext globaler Makrostrukturen

    Duparré, Angela / Notni, Gunther / Recknagel, Rolf-Jürgen | IuD Bahn | 1999

    Optical metrology roadmap for the semiconductor, optical, and data storage industries

    Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference | TIBKAT | 2001
    Contributors: Duparré, Angela

    Localization of sub-100-nm particles on wafers with solid state detector arrays [5188-35]

    Rinder, T. / Rothe, H. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Manufacturability considerations in designing optical monitoring methods for control of plasma etch processes [5188-03]

    Venugopal, V. C. / Perry, A. J. / Wallace, K. V. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Mueller matrix polarimeter in 157 nm [5188-18]

    Jin, L. / Kowa, H. / Otani, Y. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Comparative linewidth measurements on chrome and MoSi structures using newly developed microscopy methods [5188-40]

    Bodermann, B. / Mirande, W. / Kerwien, N. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter [5188-30]

    Flemming, M. / Reihs, K. / Duparre, A. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Characterization of Ag-Sb-Te alloy and its films for phase-change optical memories [5188-27]

    Sharma, Y. D. / Bhatnagar, P. K. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Digital demodulation of an interferometer for the characterization of vibrating microstructures [5188-08]

    Pitt, B. D. / Tayag, T. J. / Nelson, M. L. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Recent advances in the development of phase-shifting liquid crystal interferometers for visible and near-IR applications [5188-07]

    Marshall, K. L. / Klehn, B. / Watson, B. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Optical characterization in wide spectral range by a coherent spectrophotometer [5188-05]

    Sirutkaitis, V. / Eckardt, R. C. / Balachninaite, O. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Characterization of polarization aberrations in liquid crystal devices (Invited Paper) [5188-01]

    Wolfe, J. / Chipman, R. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Absorption measurement of DUV optical materials at 193 and 157 nm by laser-induced deflection [5188-12]

    Muhlig, C. / Kufert, S. / Triebel, W. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Low- and mid-spatial-frequency component measurement for aspheres [5188-37]

    Schulz, M. / Weingartner, I. / Elster, C. et al. | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Characterizing surface roughness of thin films by polarized light scattering (Invited Paper) [5188-33]

    Germer, T. A. / Fasolka, M. J. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    One way to accomplish the advanced requests of nanometrology: the nanometer coordinate measuring machine (NCMM) [5188-29]

    Petersen, R. / Rothe, H. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela

    Advanced transmission electron microscopy for nano-optics (Invited Paper) [5188-28]

    Kaiser, U. A. / International Society for Optical Engineering | British Library Conference Proceedings | 2003
    Contributors: Duparre, Angela