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micro-optics
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micromechanics
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title: Miniaturized systems with micro-optics and micromechanics II
System integration of micro-optical systems for beam steering and modulation applications [3276-08]
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
Polymer waveguides for telecom, datacom, and sensor applications (Invited Paper) [3276-01]
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]
Complex microprism structures and their application to multichannel fiber optic switches [3276-16]
MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Nonsilicon micromachining for MOEMS elements [3276-28]
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Evanescent field sensing: cavity-coupled refractive index sensor (CRIS) [3276-21]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
In-package active fiber optic micro-aligner [3276-20]