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    Title :

    Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion [3276-30]



    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nonsilicon micromachining for MOEMS elements [3276-28]

    Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998


    Nr. 3276

    DataCite | 1908


    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998



    Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]

    Tabib-Azar, M. / Sutapun, B. / Glawe, D. et al. | British Library Conference Proceedings | 1998