An integrated three-dimensional tactile sensor with robust structure and soft contact surface suitable for space robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and +or-10 N in the x-y horizontal directions. The sensitivity of the sensor cells in the vertical direction is 13 m V/V and in the x and y horizontal directions are both 2.3 mV/N. The tactile sensor includes 4x8 sensing cells each exhibiting an independent linear response to the three components of forces. Post bulk-micromachining was performed on foundry fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable 3-axes force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.


    Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Design and fabrication of an integrated three-dimensional tactile sensor for space robotic applications


    Contributors:
    Tao Mei (author) / Yu Ge (author) / Yong Chen (author) / Lin Ni (author) / Liao, Wei-Hsin (author) / Xu, Yangsheng (author) / Li, W.J. (author)


    Publication date :

    1999


    Size :

    6 Seiten, 7 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    Integrated Tactile Sensor for Robots

    Raibert, M. H. / Eskenazi, R. | NTRS | 1984


    Design of a 3D-printed soft robotic hand with integrated distributed tactile sensing

    Shorthose, O / Albini, A / He, L et al. | BASE | 2022

    Free access

    Design of a 3D-Printed Soft Robotic Hand With Integrated Distributed Tactile Sensing

    Oliver Shorthose / Alessandro Albini / Liang He et al. | BASE | 2022

    Free access

    Tactile Sensing for Dexterous Robotic Hands

    Martin, Toby B. | NTRS | 2000