An integrated three-dimensional tactile sensor with robust structure and soft contact surface suitable for space robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and +or-10 N in the x-y horizontal directions. The sensitivity of the sensor cells in the vertical direction is 13 m V/V and in the x and y horizontal directions are both 2.3 mV/N. The tactile sensor includes 4x8 sensing cells each exhibiting an independent linear response to the three components of forces. Post bulk-micromachining was performed on foundry fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable 3-axes force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.
Design and fabrication of an integrated three-dimensional tactile sensor for space robotic applications
1999
6 Seiten, 7 Quellen
Conference paper
English
Development of a flexible three-axial tactile sensor array for a robotic finger
British Library Online Contents | 2011
|Integrated Tactile Sensor for Robots
NTRS | 1984
|British Library Online Contents | 2010
|