An integrated three-dimensional tactile sensor with robust structure and soft contact surface suitable for space robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and +or-10 N in the x-y horizontal directions. The sensitivity of the sensor cells in the vertical direction is 13 m V/V and in the x and y horizontal directions are both 2.3 mV/N. The tactile sensor includes 4x8 sensing cells each exhibiting an independent linear response to the three components of forces. Post bulk-micromachining was performed on foundry fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable 3-axes force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.


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    Title :

    Design and fabrication of an integrated three-dimensional tactile sensor for space robotic applications


    Contributors:
    Tao Mei (author) / Yu Ge (author) / Yong Chen (author) / Lin Ni (author) / Liao, Wei-Hsin (author) / Xu, Yangsheng (author) / Li, W.J. (author)


    Publication date :

    1999


    Size :

    6 Seiten, 7 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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