The economic advantage of Safe Delivery Source gas source feed materials depends largely on maximum use of cylinder contents. In early applications, more than 50 % of the usable contents remained in the cylinder. Recent improvements in flow control technology have made it possible to utilize as much as 90 % of the gas cylinder contents with bottle pressures below 8 torr. This article discusses the design and operating principles of thermal-based flow controllers and emphasizes design features for applications with inlet pressures below 8 torr. It will also show some additional advantages for thermal-based flow controllers designed for low input pressures over alternative mass flow control methods.


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    Title :

    Thermal-based mass flow control for SDS gas delivery systems


    Additional title:

    Massenfluß-Steuerung auf der Basis des thermischen Prinzips für SDS-Gasversorgungssysteme


    Contributors:
    Urdaneta, N. (author) / Krell, J. (author) / Brown, B. (author)

    Published in:

    Solid State Technology ; 42 , 4 ; 59-65


    Publication date :

    1999


    Size :

    5 Seiten, 5 Bilder, 2 Tabellen, 5 Quellen



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




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