The economic advantage of Safe Delivery Source gas source feed materials depends largely on maximum use of cylinder contents. In early applications, more than 50 % of the usable contents remained in the cylinder. Recent improvements in flow control technology have made it possible to utilize as much as 90 % of the gas cylinder contents with bottle pressures below 8 torr. This article discusses the design and operating principles of thermal-based flow controllers and emphasizes design features for applications with inlet pressures below 8 torr. It will also show some additional advantages for thermal-based flow controllers designed for low input pressures over alternative mass flow control methods.
Thermal-based mass flow control for SDS gas delivery systems
Massenfluß-Steuerung auf der Basis des thermischen Prinzips für SDS-Gasversorgungssysteme
Solid State Technology ; 42 , 4 ; 59-65
1999
5 Seiten, 5 Bilder, 2 Tabellen, 5 Quellen
Article (Journal)
English
Tema Archive | 1988
|Magnesium Hall Thruster with Active Thermal Mass Flow Control
Online Contents | 2014
|Inlet flow characterisation of thermal mass air flow meters
Automotive engineering | 1991
|Inlet Flow Characterization of Thermal Mass Air Flow Meters
SAE Technical Papers | 1991
|