After a short history of sensor development at Motorola, this article details the technology of the surface micromachined accelerometer, its high volume application and some further developments. The development of Motorola's surface micromachined accelerometer is detailed as four fields of research: the sensing element, the signal conditioning ASIC, the packaging and the test and trim. Finally, the huge volume application (airbag system), the Motorola-Siemens partnership and additional fields of research highlight the possibilities of microsystems development.
Motorola and MEMMS: the way up to a surface micromachined accelerometer
Motorola und elektromechanische Mikrosysteme. Der Weg bis hin zu einem mikrobearbeiteten Beschleunigungsaufnehmer
Microelectronics Journal ; 28 , 4 ; 381-387
1997
7 Seiten, 8 Bilder, 10 Quellen
Article (Journal)
English
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