The Reflection Grating Spectrometer (RGS) on ESA's X-ray Multi Mirror mission (XMM) will perform spectroscopy in the energy range of 0.3-2.5 keV. For optimum photon detection efficiency, the RGS will be equipped with fully depleted, back-illuminated large area CCD's as detectors. The backside accumulation layer is produced by ion-implantation and subsequent pulsed laser annealing and should not be thicker than 0.05 micron. Sofar, the CCD development programme has resulted in a large area CCD with good performance with respect to read-noise, charge transfer efficiency and radiation hardening. Back-illuminated CCD's have been fabricated with very shallow activated p+ layers (0.06 micron, from spreading resistance profiles). X-ray measurements, however, indicate that there is a 0.22 micron thick layer with charge collection less than unity. This may be due to a layer of implanted boron and associated lattice damage, which is left unanealed. Anodic etching, ultra-low energy implantation and gas immersed laser doping are being studied as improvements and alternatives.
The development of back-illuminated CCD's for XMM
Die Entwicklung von Hintergrund beleuchteten CCD's für die XMM-Mission der ESA
1992
6 Seiten, 8 Bilder, 8 Quellen
Conference paper
English
Versatile Controller for CCD's
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