Although gas purity and safety will always be key issues, keeping process tools up and running is the chief concern in specialty gas delivery. You've heard tales of the 'billion-dollar fab'. While it's not quite here yet, a big chunk of those megadollars will go toward capital equipment. So it's no wonder that keeping process tools up and running has become a critical issue. It's also where specialty gas delivery can reflect directly on a company's bottom line. One result has been growing involvement by gas suppliers in device makers' total system needs.


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    Title :

    How specialty gas delivery impacts the uptime equation


    Additional title:

    Einfluß der Lieferung von Spezialglas auf die Uptime-Gleichung


    Contributors:
    Iscoff, R. (author)

    Published in:

    Publication date :

    1992


    Size :

    4 Seiten, 2 Bilder



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English