A process gas mass flow controller satisfying the demanding requirements for many applications in the microelectronics industry should have the following design and performance features: its flow monitor is a capillary-tube thermal mass flow monitor with stable sensor coils; its sensor tube, bypass, and valve orifice has maximum cross-sectional areas and are easy to remove and clean or replace, its valve is electromagnetic and has PID control; its accuracy is 1 percent of full scale, its repeatability is 0.2 percent of full scale; and its time response is 1 second to within 2 percent of set point; it is assembled in a cleanroom environment; it is subjected to vacuum and pressure leak checkes and to long-term static and dynamic burn-in; and it is calibrated using primary flow calibration standards.
Process gas mass flow controllers - an overview
Masendurchflussueberwachung von Prozessgasen. Eine Uebersicht
Solid State Technology ; 31 , 4 ; 58-60
1988
3 Seiten, 4 Bilder, 8 Quellen
Article (Journal)
English
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