Making the right choices of welding techniques, piping materials, filtration, exhaust ducting and purge procedures helps ensure safe and contamination free gas distribution. In the 1970s, when semiconductor features were five microns plus, little consideration was given to process gases or the process gas distribution system. Systems leak checking, for example, was done with liquid 'snoop', where the appearance of bubbles indicated a leak. The installation technique involved the use of compression or 'Swage' action type fittings. These fittings were used primarily due to ease of installation and could be made to have reasonable leak rates at the time of installation.


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    Title :

    Constructing VLSI gas distribution systems


    Additional title:

    Konstruktion eines Gasverteilungssystems fuer die VLSI-Technologie


    Contributors:
    Lyon, R.C. (author)

    Published in:

    Publication date :

    1988


    Size :

    3 Seiten, 3 Bilder, 8 Quellen


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




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