This paper describes the design, fabrication, characterization and packaging of a 256 element MEMS floating element shear stress sensor array-on-a-chip. This device is targeted at measuring time resolved fine spatial scale shear stress beneath the turbulent boundary layer (TBL) for aerospace applications. The differential measurement shows a sensitivity of 0.08 mV/Pa at 0.27 mV/√Hz. The linear ranges are observed up to 3.6 Pa and 6 Pa respectively for 3 µm and 10 µm-thick structure.


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    Title :

    Micromachined nickel floating element shear stress sensor array


    Contributors:
    Zhao, Z. (author) / Gallman, J. (author) / White, R. (author)


    Publication date :

    2012


    Size :

    7 Seiten, 8 Bilder, 1 Tabelle, 9 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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