The majority of MEMS based gyroscopes currently under development operates in a vibratory mode and measures the angular rate instead of the absolute angle. The paper aims to establish the system dynamics models of the typical MEMS Gyro: Vibration Micro-gyroscope and analyzes the dynamic features. With different precision MEMS Gyros as the example, the detailed Times-series analysis are made of AR (6) and ARMA (2, 1) models, the impact of considering the estimation effective and the precision improved.
Research on Stochastic Modeling of MEMS Gyroscope
2012
4 Seiten
Conference paper
English
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