Tire pressure monitoring systems (TPMS) are beneficial for the environment and road and passenger safety. Miniaturizing the TPMS allows sensing of additional parameters. This paper presents a miniaturized TPMS with a volume less than 1 cm3, realised by 3D stacking and through-silicon via (TSV) technology. Suitable technologies with low electrical resistance and high bond strengths were evaluated for stacking the microcontroller, transceiver, pressure sensor and bulk acoustic resonator (BAR) in the TPMS. 60 micron deep W-filled TSVs with resistance 0.45 Ohm and SnAg micro bumps with a bond strength of 53 MPa were used for stacking the transceiver to the microcontroller. TSVs through the whole wafer thickness with resistance 6 Ohm were used for the pressure sensor. Au stud bumps were used for stacking the pressure sensor and BAR devices. The final TPMS stack was packaged in a moulded interconnect device (MID) package.


    Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Miniaturised sensor node for tire pressure monitoring (e-CUBES)


    Contributors:
    Schjolberg-Henriksen, K. (author) / Taklo, M.M.V. (author) / Lietaer, N. (author) / Prainsack, J. (author) / Dielacher, M. (author) / Klein, M. (author) / Wolf, M.J. (author) / Weber, J. (author) / Ramm, P. (author) / Seppänen, T. (author)


    Publication date :

    2009


    Size :

    19 Seiten, 14 Bilder, 35 Quellen




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Miniaturised Sensor Node for Tire Pressure Monitoring (e-CUBES)

    Schjolberg-Henriksen, K. / Taklo, M.M.V. / Lietaer, N. et al. | British Library Conference Proceedings | 2009


    TIRE PRESSURE MONITORING SENSOR

    DR RIEMANN ANDREAS / WICHER BARTLOMIEJ | European Patent Office | 2019

    Free access

    Tire pressure monitoring sensor

    RIEMANN ANDREAS / WICHER BARTLOMIEJ | European Patent Office | 2020

    Free access

    Tire pressure monitoring sensor

    MCINTYRE MATTHEW D / DENIAU JEAN-CHRISTOPHE / FARRELL BRIAN et al. | European Patent Office | 2016

    Free access

    TIRE PRESSURE MONITORING SENSOR

    MCINTYRE MATTHEW D / DENIAU JEAN-CHRISTOPHE / FARRELL BRIAN et al. | European Patent Office | 2019

    Free access