Bulk micromachining from VTI Technologies Oy is well known for excellent performance especially for low-g measurements. The latest development of VTI 3D - MEMS has combined higher aspect ratios reached with deep reactive ion etching with those bulk structures. This has allowed shrinking the die size of sensing elements in combination with even better performance than earlier generation of accelerometers and inclinometers. Parallel to this dedicated integrated circuits have been developed in a way that better and more precise signal conditioning and highly advanced safety features were possible in the same die. This has provided an excellent tool box for failure detection that enables latest automotive application to come along with a minimum amount of physical sensors; so called sensor fusion.


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    Title :

    High-end inclinometers - evolution of digital platform towards performance, safety and sensor fusion


    Additional title:

    Hochtechnologie-Neigungssensor - Entwicklung einer digitalen Plattform mit Zielrichtung Betriebsverhalten, Sicherheit und Sensorzusammenführung


    Contributors:


    Publication date :

    2007


    Size :

    12 Seiten, 9 Bilder, 1 Quelle



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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