Distance sensors are very important for anti-collision sensors in automotives. This paper reports the application of Barium Strontium Titanate Ba1SrTiO3 (BST) thin film as distance sensor using a bolometric method. Capacitance device with structure of Al/BST/TiO2/RuO2/SiO2/Si was fabricated. The BST film was prepared using RF magnetron sputtering. The device was then illuminated with an infrared light source from an LED with a peak wavelength at 830 nm. The illumination has increased the temperature of the film, hence changed the capacitance. The change in the capacitance was detected through the voltage changed in the device. It was found that the change of the voltage was decreased with the increment of distance film to the light source.


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    Title :

    Application of barium strontium titanate thin film as distance sensor




    Publication date :

    2004


    Size :

    3 Seiten, 7 Quellen


    Remarks:

    pp.



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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